Semiconductor

Semiconductor processes are highly sensitive to particles and micro-contamination. Slit&Hole provides acid/alkali-resistant precision filtration and resin protection solutions to reduce particulate risks in ultrapure water (UPW) and chemical supply/return loops—supporting stable operation and yield optimization.

Applications include UPW pretreatment/loop protection, upstream protection for etch/clean chemicals, ion-exchange resin retention, and tank recirculation filtration.

Key benefits: strong material compatibility, customizable micro-aperture/slot geometry, reduced risk to resins and downstream tools, improved line stability.

Process Applications: Ultrapure water systems, etching processes, CMP polishing, ion exchange resin protection.

＊Share chemical type, temperature, target cut size, and flow rate—our engineers will recommend materials and design.